TY - JOUR T1 - Electron-Impact Ionization of SiCl, $SiC_2$ and $SiCl_4$ Molecules AU - Pandya , C. V. JO - Journal of Atomic and Molecular Sciences VL - 1 SP - 41 EP - 48 PY - 2013 DA - 2013/04 SN - 4 DO - http://doi.org/10.4208/jams.022812.032212a UR - https://global-sci.org/intro/article_detail/jams/8224.html KW - electron impact ionization, ionization cross sections, BEB model. AB -

Total ionization collision cross sections are calculated for silicon chloride compounds namely $SiCl,$ $SiCl_2$ and $SiCl_4$ applying binary-encounter-Bethe (BEB) and modified BEB model for projectile energy from the ionization threshold to 1000 eV. The total ionization cross sections obtained using the binary-encounter-Bethe (BEB) model and the modified BEB model are compared with experimental and theoretical results. This model has been found to be successful for a wide range of molecules but for silicon chloride molecules the results are not in good agreement with experimental data.