TY - JOUR
T1 - Total Cross Sections for Electron Scattering from $CF_4$, $C_2F_4$, $C_2F_6$, $C_3F_8$ in the Energy Range from 100 eV to 5000 eV
AU - Tan , Xiaoming
AU - Liu , Mingliang
JO - Journal of Atomic and Molecular Sciences
VL - 2
SP - 113
EP - 118
PY - 2015
DA - 2015/06
SN - 6
DO - http://doi.org/10.4208/jams.041115.050915a
UR - https://global-sci.org/intro/article_detail/jams/8206.html
KW - total cross section, electron scattering, the revised additivity rule.
AB - <p style="text-align: justify;">The additivity rule for electron scattering from molecule has been revised by
considering the difference between the free atom and the corresponding bound atom
in the molecule. The total cross sections for electron scattering from plasma etching
molecules $CF_4,$ $C_2F_4,$ $C_2F_6$ and $C_3F_8$ have been calculated in the energy range from 100
eV to 5000 eV with the revised additivity rule. The present calculations are compared
with the original additivity rule results and the existing experimental data. A better
agreement between the present results and the experimental data is obtained.</p>