TY - JOUR
T1 - Simulation of Three-Dimensional Strained Heteroepitaxial Growth Using Kinetic Monte Carlo
AU - Tim P. Schulze & Peter Smereka
JO - Communications in Computational Physics
VL - 5
SP - 1089
EP - 1112
PY - 2011
DA - 2011/10
SN - 10
DO - http://doi.org/10.4208/cicp.101210.241210a
UR - https://global-sci.org/intro/article_detail/cicp/7476.html
KW - 
AB - <p style="text-align: justify;">Efficient algorithms for the simulation of strained heteroepitaxial growth
with intermixing in 2+1 dimensions are presented. The first of these algorithms is an
extension of the energy localization method [T. P. Schulze and P. Smereka, An energy
localization principle and its application to fast kinetic Monte Carlo simulation of heteroepitaxial
growth, J. Mech. Phys. Sol., 3 (2009), 521–538] from 1+1 to 2+1 dimensions.
Two approximations of this basic algorithm are then introduced, one of which treats
adatoms in a more efficient manner, while the other makes use of an approximation
of the change in elastic energy in terms of local elastic energy density. In both cases,
it is demonstrated that a reasonable level of fidelity is achieved. Results are presented
showing how the film morphology is affected by misfit and deposition rate. In addition,
simulations of stacked quantum dots are also presented.</p>